Raman scattering analysis revealed that the structure of carbon (C) films prepared by pulsed laser deposition at room … of 900 to 2300 cm-1 in which several peaks always appear in a-CNx films. The spectra were deconvoluted into Raman D and G … peaks and the structural parameters were determined. The upward shifts of Raman G peak towards 1592 cm-1 show evidence of a …