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A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
Chien, Chen-fu
;
Hsu, Shao-chung
;
Chen, Ying-jen
- In:
International journal of production research
51
(
2013
)
8
,
pp. 2324-2338
Persistent link: https://www.econbiz.de/10009731376
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