RUSOP, M.; SOGA, T.; JIMBO, T.; UMENO, M.; SHARON, M. - In: Surface Review and Letters (SRL) 12 (2005) 04, pp. 587-595
Amorphous carbon nitride (a-CNx) films have been deposited by pulsed laser deposition at 0.8 Torr nitrogen gas ambient with varying substrate temperature from 20 to 500°C. The effects of the substrate temperature and ambient nitrogen gas pressure on the surface morphology, composition, nitrogen...