Su, Chao-Ton; Hsu, Chun-Chin - In: Omega 32 (2004) 6, pp. 473-480
In recent years, the exponential-weighted-moving-average (EWMA) statistic based controllers are popular in semiconductor manufacturing. However, the single EWMA controller is not sufficient for compensating for the wear-out process. Thus, a double EWMA controller was proposed to enhance the...