WANG, M. X.; ZHANG, J. J.; LIU, Q. X.; LI, D. J. - In: Surface Review and Letters (SRL) 13 (2006) 02, pp. 173-177
The influence of substrate rotary speed, species of reaction gases and flows on nanoindentation, nanoscratch fracture, and residual stress were explored on reactive sputtered nanoscale CrN/ZrN multilayered coatings. Hardness and critical fracture load as high as 32 GPa and 85 mN with desirable...