Focsa, A.; Gordon, I.; Auger, J.M.; Slaoui, A.; … - In: Renewable Energy 33 (2008) 2, pp. 267-272
In this work, we present the structural quality of polycrystalline silicon films formed by high-temperature chemical vapor deposition (CVD) on mullite ceramics coated with spin-on flowable oxides (FOx) serving as intermediate layers (ILs). The average grain size and the size distribution were...