Ma, Z.Q; Ma, Z.Q; Wang, Y.L; Lan, Z.X; Zhao, L.; Xu, F.; … - 2022
The presence of silicon oxyphosphide in the heavily phosphorus-doped n + -type polycrystalline silicon film (poly Si) of TOPCon solar cell has been mainly revealed through a depth-profile X-ray photoelectron spectroscopy (XPS) characterization of chemical components. X-ray diffraction (XRD)...