A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP)
S. Kumar; T. K. Garg; V. P. Wani
Year of publication: |
2011
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Authors: | Kumar, S. ; Garg, T. K. ; Wani, V. P. |
Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 20374021. - Vol. 22.2011, 2, p. 145-159
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