A performance analytical model of automated material handling system for semiconductor wafer fabrication system
Year of publication: |
1-15 March 2016
|
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Authors: | Zhang, Jie ; Qin, W. ; Wu, L. H. |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 5/6 (1/15.3.), p. 1650-1669
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Subject: | automated material handling system | Markov chain | performance analysis | semiconductor manufacturing | Halbleiterindustrie | Semiconductor industry | Markov-Kette | Halbleiter | Semiconductor | Automatisierung | Automation |
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