A run-to-run control algorithm based on timely and delayed mixed-resolution information
Year of publication: |
2013
|
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Authors: | Wang, Kaibo ; Lin, Jing |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 51.2013, 15 (1.8.), p. 4704-4717
|
Subject: | run-to-run process control | statistical process adjustment | statistical process control | Qualitätsmanagement | Quality management | Produktionssteuerung | Production control | Halbleiterindustrie | Semiconductor industry | Statistische Qualitätskontrolle | Statistical quality control | USA | United States | Theorie | Theory |
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