A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing
Year of publication: |
2023
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Authors: | Vimala Rani, M. ; Mathirajan, Muthu |
Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 61.2023, 16, p. 5744-5771
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Subject: | classification schemes | deterministic scheduling | Diffusion furnaces | meta-analysis | semiconductor manufacturing industry | Scheduling-Verfahren | Scheduling problem | Meta-Analyse | Meta-analysis | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor |
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