Bulk micromachining for SOI based microsystems using double side XeF2 etching
Avinash K. Bhaskar, Muthukumaran Packirisamy and Rama B. Bhat
| Year of publication: |
2008
|
|---|---|
| Authors: | Bhaskar, Avinash K. ; Packirisamy, Muthukumaran ; Bhat, Rama B. |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 2037402-1. - Vol. 13.2008, 2/3/4, p. 297-307
|
| Subject: | Mikrosystemtechnik | Microsystems | Optoelektronik-Industrie | Optoelectronics industry |
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10003641433