Carbon as a MEMS material : micro and nanofabrication of pyrolysed photoresist carbon
Year of publication: |
2008
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Authors: | Wang, Chunlei ; Zaouk, Rabih ; Park, Bejamin Y. ; Madou, Marc J. |
Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 2037402-1. - Vol. 13.2008, 2/3/4, p. 360-375
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Subject: | Treibhausgas-Emissionen | Greenhouse gas emissions | Mikrosystemtechnik | Microsystems | Nanotechnologie | Nanotechnology |
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