COMPARISON OF FERROELECTRIC PROPERTIES OF COSUBSTITUTED BISMUTH TITANATE FILMS BETWEEN Bi3.15Nd0.85Ti2.97Mg0.03O12 AND Bi3.15Nd0.85Ti2.95Mn0.05O12

Aiming at the influence of substitution on ferroelectric behaviors, Nd and Mg/Mn cosubstituted bismuth titanate films, Bi3.15Nd0.85Ti2.97Mg0.03O12 (BNTMg) and Bi3.15Nd0.85Ti2.95Mn0.05O12 (BNTMn), have been prepared on Pt/Ti/SiO2/Si(100) substrates at 700°C by a chemical solution deposition technique, respectively. A series of comparisons including structures, surface morphologies, and ferroelectric properties of the as-prepared films were carried out by X-ray diffraction, scanning electron microscope, and a Radiant Technologies Precision Workstation for ferroelectric test system. It was found that the films possess preferred the (117) and (00l)-oriented polycrystalline structures, and the remnant polarization of BNTMg film is larger than that of BNTMn film and the coercive field of BNTMn film is lower than that of BNTMg film. The values of 2Pr and 2Ec of BNTMg and BNTMn are 28 μC/cm2 and 212 kV/cm, and 15 μC/cm2 and 175 kV/cm, respectively. The relevant physical mechanisms were pursued.