Effect of the Cu underlayer on the optoelectrical properties of ITO/Cu thin films
Sn doped indium oxide (ITO) single layer films and ITO/Copper (Cu) bi-layer films were prepared on polycarbonate substrates by DC and RF magnetron sputtering without intentional substrate heating. In order to consider the influence of the Cu underlayer on the optoelectrical properties and microstructures of the films, the thickness of the Cu bottom layer in the ITO/Cu films was varied from 5 to 20nm.
Year of publication: |
2010
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Authors: | Chae, J.H. ; Kim, Daeil |
Published in: |
Renewable Energy. - Elsevier, ISSN 0960-1481. - Vol. 35.2010, 1, p. 314-317
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Publisher: |
Elsevier |
Subject: | ITO | Copper | Magnetron sputtering | Optical properties | Resistivity |
Saved in:
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