Fuzzy-based risk priority number in FMEA for semiconductor wafer processes
Year of publication: |
2014
|
---|---|
Authors: | Yeh, Tsu-ming ; Chen, Long-yi |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 2 (15.1.), p. 539-549
|
Subject: | failure mode and effect analysis (FMEA) | risk priority number (RPN) | fuzzy theory | semiconductor wafer manufacturing processes | Halbleiter | Semiconductor | Qualitätsmanagement | Quality management | Halbleiterindustrie | Semiconductor industry | Fuzzy-Set-Theorie | Fuzzy sets | Risikomanagement | Risk management | Prozessmanagement | Business process management |
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