GROWTH OF ZIRCONIUM SILICATE THIN FILM BY PULSED-MOCVD USING ZTB AND TDEAS
Year of publication: |
2006
|
---|---|
Authors: | KIM, JAEHYUN ; YONG, KIJUNG |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 13.2006, 05, p. 567-571
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Zirconium silicate | MOCVD | metal oxide |
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