Job scheduling of diffusion furnaces in semiconductor fabrication facilities
Kan Wu, Edward Huang, Mengchang Wang, Meimei Zheng
| Year of publication: |
2022
|
|---|---|
| Authors: | Wu, Kan ; Huang, Edward ; Wang, Mengchang ; Zheng, Meimei |
| Published in: |
European journal of operational research : EJOR. - Amsterdam : Elsevier, ISSN 0377-2217, ZDB-ID 243003-4. - Vol. 301.2022, 1 (16.8.), p. 141-152
|
| Subject: | Dynamic programming | Manufacturing | Scheduling | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Dynamische Optimierung | Halbleiter | Semiconductor |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1016/j.ejor.2021.09.044 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10013207358