Lumped parameter modelling of the litho cell
| Year of publication: |
2011
|
|---|---|
| Authors: | Kock, A. A. A. ; Veeger, C. P. L. ; Etman, L. F. P. ; Lemmen, B. ; Rooda, J. E. |
| Published in: |
Production planning & control : PPC. - London [u.a.] : Taylor & Francis, ISSN 0953-7287, ZDB-ID 10481977. - Vol. 22.2011, 1, p. 41-50
|