Micromachining of silicon with excimer laser in air and water medium
Year of publication: |
2010
|
---|---|
Authors: | Das, Alok Kumar ; Saha, Partha |
Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 2037402-1. - Vol. 21.2010, 1/2, p. 42-53
|
Subject: | Technischer Fortschritt | Technological change | Technologie | Technology | Laser | USA | United States | Optoelektronik-Industrie | Optoelectronics industry |
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