Minimising idle times in cluster tools in the semiconductor industry
Year of publication: |
2010
|
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Authors: | Lati, N. ; Gilad, I. |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 48.2010, 21/22 (1/15.11.), p. 6443-6459
|
Subject: | Halbleiterindustrie | Semiconductor industry | Fertigungsinsel | Cellular manufacturing | Roboter | Robot | Scheduling-Verfahren | Scheduling problem | Engpass | Bottleneck | Algorithmus | Algorithm |
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