Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers
| Year of publication: |
2012
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|---|---|
| Authors: | Choi, Gyunghyun ; Kim, Sung-Hee ; Ha, Chunghun ; Bae, Suk Joo |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 50.2012, 12 (15.6.), p. 3274-3288
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