Extent:
Online-Ressource
v.: digital
Series:
Type of publication: Book / Working Paper
Language: German
Notes:
In: Springer-Online
ISBN: 978-3-540-35005-7 ; 978-3-540-21068-9
Other identifiers:
10.1007/3-540-35005-5 [DOI]
Classification: Mikrosystemtechnik, Nanotechnologie
Source:
ECONIS - Online Catalogue of the ZBW
Persistent link: https://www.econbiz.de/10013516875