OPTICAL AND STRUCTURAL PROPERTIES OF NITROGENATED DIAMOND-LIKE CARBON FILMS PREPARED BY r.f. PECVD
Year of publication: |
2006
|
---|---|
Authors: | RUSOP, M. ; ABDULLAH, S. ; PODDER, J. ; SOGA, T. ; JIMBO, T. |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 13.2006, 01, p. 1-6
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Optical properties | bonding properties | nitrogenated | nitrogen incorporation | amorphous carbon | PECVD |
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