Performance evaluation of photolithography cluster tools : queueing and throughput models
Year of publication: |
2007
|
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Authors: | Morrison, James R. ; Martin, Donald P. |
Published in: |
OR spectrum : quantitative approaches in management. - Berlin : Springer, ISSN 0171-6468, ZDB-ID 2073885-7. - Vol. 29.2007, 3, p. 375-389
|
Subject: | Halbleiter | Semiconductor | Performance-Messung | Performance measurement | Warteschlangentheorie | Queueing theory | Theorie | Theory |
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