PREPARATION OF INDIUM TIN OXIDE FILMS BY RADIO FREQUENCY MAGNETRON SPUTTERING UNDER LOW VACUUM LEVEL
Year of publication: |
2006
|
---|---|
Authors: | ZHU, H. B. ; LI, X. D. ; HUANG, S. Y. ; JIN, C. X. ; SUN, Z. ; CHEN, Y. W. ; HUANG, S. M. |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 13.2006, 06, p. 833-840
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Indium tin oxide | thin films | radio frequency magnetron sputtering | X-ray photoelectron spectroscopy | 68.55.Jk | 73.61.-r | 78.66.-w | 81.40.Ef |
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