Production Planning and Control for Semiconductor Wafer Fabrication Facilities : Modeling, Analysis, and Systems

Online-Ressource (XII, 288 p. 46 illus., 22 illus. in color, digital)

Operations Research/Computer Science Interfaces Series ; 52

Description based upon print version of record

Production Planning and Control for Semiconductor Wafer Fabrication Facilities; Preface; Contents; Notation; Chapter 1 Introduction; 1.1 Motivation; 1.2 Outline of the Book; Chapter 2 Semiconductor Manufacturing Process Description; 2.1 Semiconductor Manufacturing Overview; 2.2 Front-End and Back-End Operations; 2.2.1 Overall Framework for Manufacturing Systems; 2.2.2 Description of the Base System; 2.2.3 Description of the Base Process; 2.3 Production Planning and Control Hierarchy; Chapter 3 Modeling and Analysis Tools; 3.1 Systems and Models; 3.1.1 Representation of Systems by Models

3.1.2 Types of Models3.2 Decision Methods and Descriptive Models; 3.2.1 Optimal Approaches vs. Heuristics; 3.2.2 Branch-and-Bound Algorithms; 3.2.3 Mixed Integer Programming; 3.2.4 Stochastic Programming; 3.2.5 Dynamic Programming; 3.2.6 Neighborhood Search Techniquesand Genetic Algorithms; 3.2.7 Queueing Theory; 3.2.8 Discrete-Event Simulation Techniques; 3.2.9 Response Surface Methodology; 3.2.10 Learning Approaches; 3.2.11 Summary of Decision Methodsand Descriptive Models; 3.3 Performance Assessment; 3.3.1 Performance Assessment Methodology

3.3.2 Architecture for Simulation-Based Performance AssessmentChapter 4 Dispatching Approaches; 4.1 Motivation and Taxonomy of Dispatching Rules; 4.2 Simple Dispatching Rules; 4.2.1 JS-Related Dispatching Rules; 4.2.2 MS-Related Dispatching Rules; 4.3 Composite Dispatching Rules; 4.3.1 Critical Ratio Dispatching Rules; 4.3.2 ATC-Type Dispatching Rules; 4.3.3 Composite Dispatching Rules for the MS; 4.4 Simulation Results for Assessing Dispatching Rules; 4.5 Batching Rules; 4.6 Look-Ahead Rules; 4.6.1 Dynamic Batching Heuristic; 4.6.2 Next Arrival Control Heuristic

4.6.3 Additional Look-Ahead Research4.6.4 BATC-Type Rules; 4.7 More Sophisticated Approaches; 4.7.1 Rule-Based Systems; 4.7.2 Determining Parameters of Dispatching Rules Based on Iterative Simulation; 4.7.3 Construction of Blended Dispatching Rules; 4.7.4 Automated Discovery of Dispatching Rules; Chapter 5 Deterministic Scheduling Approaches; 5.1 Motivation and Definitions; 5.2 Simulation-Based Scheduling; 5.3 Equipment Scheduling; 5.3.1 Scheduling Jobs on a Single Batch Machine; 5.3.2 Scheduling Jobs on a Single Cluster Tool

5.3.3 Scheduling Jobs on Parallel Machineswith Sequence-Dependent Setup Times5.3.4 Scheduling Jobs with Ready Times on ParallelBatch Machines; 5.3.5 Scheduling Problems for Parallel Machines with Auxiliary Resources; 5.3.6 Multiple Orders per Job Scheduling Problems; 5.4 Full Factory Scheduling; 5.4.1 Motivation and Problem Statement; 5.4.2 Disjunctive Graph Representationfor Job Shop Problems; 5.4.3 Decomposition Approach; 5.4.4 Subproblem Solution Procedures; 5.4.5 Simulation-Based Performance Assessment; 5.4.6 Distributed Shifting Bottleneck Heuristic

5.4.7 Multicriteria Approach to Solve Large-Scale Job Shop Scheduling Problems

10.1007/978-1-4614-4472-5 [DOI]

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