Sequencing optimisation for makespan improvement at wet-etch tools
Year of publication: |
2015
|
---|---|
Authors: | Rotondo, Anna ; Young, Paul ; Geraghty, John |
Published in: |
Computers & operations research : and their applications to problems of world concern ; an international journal. - Oxford [u.a.] : Elsevier, ISSN 0305-0548, ZDB-ID 194012-0. - Vol. 53.2015, p. 261-274
|
Subject: | Wet-etch tool | Makespan | Sequencing optimisation | Genetic algorithms | Scheduling-Verfahren | Scheduling problem | Evolutionärer Algorithmus | Evolutionary algorithm | Durchlaufzeit | Lead time | Mathematische Optimierung | Mathematical programming | Theorie | Theory |
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