Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations
Year of publication: |
2020
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Authors: | Yu, Tae-Sun ; Lee, Tae-Eog |
Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 58.2020, 2, p. 434-447
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Subject: | cleaning | cluster tool | quality control | scheduling | semiconductor manufacturing | time constraint | wafer delay | Regionales Cluster | Regional cluster | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Qualitätsmanagement | Quality management |
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