Chang, Yung-Chia; Chen, Chuan-Yung - In: International Journal of Quality & Reliability Management 31 (2014) 4, pp. 380-394
Purpose – Semiconductor wafer fabrication (FAB) is recognized as one of the most complex manufacturing systems. A newly built FAB has to pass various audits from its customer before the customer's wafers are initially produced. 5S audit is one of them. In order to comply with customer...