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~person:"Hsu, Chia-Yu"
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A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns for yield enhancement in semiconductor manufacturing
Chien, Chen-Fu
;
Chen, Ying-Jen
;
Hsu, Chia-Yu
- In:
Computers & operations research : and their …
53
(
2015
),
pp. 309-318
Persistent link: https://www.econbiz.de/10010493471
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