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~person:"Saha, Partha"
~subject:"USA"
~type_genre:"Article in journal"
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Search: subject_exact:"Optoelectronics industry"
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Micromachining of silicon with excimer laser in air and water medium
Das, Alok Kumar
;
Saha, Partha
- In:
International journal of manufacturing technology and …
21
(
2010
)
1/2
,
pp. 42-53
Persistent link: https://www.econbiz.de/10003988744
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