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Search: person:"Madou, Marc J."
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International journal of manufacturing technology and management
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Carbon as a MEMS material : micro and nanofabrication of pyrolysed photoresist carbon
Wang, Chunlei
;
Zaouk, Rabih
;
Park, Bejamin Y.
;
Madou, …
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 360-375
Persistent link: https://www.econbiz.de/10003641446
Saved in:
2
Carbon as a MEMS material : micro and nanofabrication of pyrolysed photoresist carbon
Wang, Chunlei
;
Zaouk, Rabih
;
Park, Bejamin Y.
;
Madou, …
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 360-375
Persistent link: https://www.econbiz.de/10009873030
Saved in:
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