XU, L.; LI, W.; ZHAO, W. M.; SUN, P.; XU, J.; MA, Z. Y.; … - In: Surface Review and Letters (SRL) 14 (2007) 04, pp. 709-712
We present the fabrication of large-scale two-dimensional periodic silicon nanoarrays using nanosphere lithography. The techniques start from a monolayer of self-assembled polystyrene (PS) spheres of 220 nm in diameter on water surface, which works as a mask to fabricate large-scale periodic...