Chen, Hualun; Xu, Zhaozhao; Xiong, Wei; Zhang, Jian; … - 2022
An aggressively scaled triple self-aligned split-gate floating-gate (FG) NOR-type dual-bit/cell (NORD) flash cell with a common select-gate (SG) was fabricated at 55-nm node technology. Both FG- and SG-length, for the first time, were scaled down to sub-80 nm and sub-60 nm in our NORD flash,...
