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Nanocomposite nc-ZrCN/a-C:H(N) films were prepared by filtered cathodic vacuum arc technique using the C2H2 and N2 gas as the precursor. The effect of the C2H2 and N2 flow rate on the microstructure, internal stress, phase composition, and mechanical properties of nanocomposite nc-ZrCN/a-C:H(N)...
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