Rowshannahad, M.; Dauzère-Pérès, S.; Cassini, B. - In: Omega 54 (2015) C, pp. 50-59
In semiconductor manufacturing, machines are usually qualified to process a limited number of recipes related to products. It is possible to qualify recipes on machines to better balance the workload on machines in a given toolset. However, all machines of a toolset do not have equal uptimes and...