Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Chen-Fu Chien, Chiao-Wen Liu and Shih-Chung Chuang
| Year of publication: |
1-15 September 2017
|
|---|---|
| Authors: | Chien, Chen-Fu ; Liu, Chiao-Wen ; Chuang, Shih-Chung |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 55.2017, 17/18 (1/15.9.), p. 5095-5107
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| Subject: | data mining | big data | semiconductor manufacturing | outlier detection | co-linearity | excursion | Data Mining | Data mining | Big Data | Big data | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2015.1109153 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10011723925