Big data analytics for forecasting cycle time in semiconductor wafer fabrication system
Junliang Wang and Jie Zhang
| Year of publication: |
1-15 December 2016
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|---|---|
| Authors: | Wang, Junliang ; Zhang, Jie |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 23/24 (1/15.12.), p. 7231-7244
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| Subject: | cycle time | forecasting | big data | wafer fabrication | Prognoseverfahren | Forecasting model | Big Data | Big data | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor | Data Mining | Data mining |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2016.1174789 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10011566349