Constructing the OGE for promoting tool group productivity in semiconductor manufacturing
Year of publication: |
2007
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Authors: | Chien, Chen-Fu ; Chen, Hsin-Kai ; Wu, Jei-Zheng ; Hu, Chih-Han |
Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 45.2007, 3, p. 509-524
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