EFFECT OF SUBSTRATE TEMPERATURE ON MICRO-STRUCTURAL PROPERTIES OF Ti AND TiN FILMS DEPOSITED BY E-BEAM EVAPORATION TECHNIQUE
Year of publication: |
2012
|
---|---|
Authors: | ARSHI, NISHAT ; LU, JUNQING ; KOO, BON HEUN ; LEE, CHAN GYU ; AHMED, FAHEEM |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 19.2012, 04, p. 1250037-1
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | Thin films | vapor deposition | texture | X-ray diffraction | titanium nitride |
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