HIGH-QUALITY INTRINSIC ZnO FILM FOR THE APPLICATION OF SOLAR CELL GROWN BY ICP-ASSISTED REACTIVE DC MAGNETRON SPUTTERING AT LOW TEMPERATURE
Intrinsic zinc oxide (i-ZnO) film was prepared for CuInSe2 (CIS) solar cell application [L. Stolt and J. Hedstrom, Appl. Phys. Lett. 62 (1993) 8; D. Rudmann, Ph.D. Thesis, University of Basel, Basel, (2004)] on glass substrate by inductively coupled plasma (ICP)-assisted DC magnetron sputtering and under a quite low temperature of 50°C. The sputtering was done in an Ar and O2 gas mixture and a ceramic ZnO target was used. The microstructures of the film were investigated by X-ray diffractometer and scanning electron microscope. It was shown that all of the films had a c-axis preferred orientation perpendicular to the substrate. In our work, film with resistivity of 7 × 108Ω·cm and transmittance of about 80% in the visible range was prepared under the conditions of 4 mTorr working pressure and 50°C temperature.
Year of publication: |
2007
|
---|---|
Authors: | XU, X. B. ; HUANG, S. M. ; CHEN, Y. W. ; SUN, Z. ; HUANG, S. Y. |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 14.2007, 06, p. 1083-1087
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Saved in:
Online Resource
Saved in favorites
Similar items by person
-
INFLUENCE OF CADMIUM SALTS ON A MODIFIED CHEMICAL BATH DEPOSITION OF CADMIUM SULFIDE THIN FILMS
XU, X. B., (2008)
-
STUDY OF CHEMICAL BATH DEPOSITION OF ZnS THIN FILMS WITH SUBSTRATE VIBRATION
BIAN, Z. Q., (2008)
-
PREPARATION OF INDIUM TIN OXIDE FILMS BY RADIO FREQUENCY MAGNETRON SPUTTERING UNDER LOW VACUUM LEVEL
ZHU, H. B., (2006)
- More ...