Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
Year of publication: |
2009
|
---|---|
Authors: | Chen, Liang ; Ma, Mingda ; Jang, Shi-shang ; Wang, David Shan-hill ; Wang, Shuqing |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 47.2009, 15 (1.8.), p. 4173-4199
|
Subject: | Produktionssteuerung | Production control | Marketingmanagement | Marketing management | Halbleiterindustrie | Semiconductor industry | USA | United States |
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