Ghosh, S.N.; Parm, I.O.; Dhungel, S.K.; Jang, K.S.; … - In: Renewable Energy 33 (2008) 2, pp. 320-325
In the present work, we report on the evidence for a high negative charge density in aluminum oxinitride (AlON) coating on silicon. A comparative study was carried out on the composition and electrical properties of AlON and aluminum nitride (AlN). AlON films were deposited on p-type Si (100)...