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In the present work, we report on the evidence for a high negative charge density in aluminum oxinitride (AlON) coating on silicon. A comparative study was carried out on the composition and electrical properties of AlON and aluminum nitride (AlN). AlON films were deposited on p-type Si (100)...
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A new texturization process based on a uniform, isotropic and slow removal of silicon, using a composition of sodium hydroxide (NaOH) and sodium hypochlorite (NaOCl) solution at an elevated temperature is developed recently for multicrystalline silicon solar cells. This process is applied in...
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