Hong, TaeHyun; Kim, KyungRok; Lee, Seung-Hwan; Choi, Su-Hwan - 2022
Indium oxide (InOx) thin films have attractive carrier transport properties for oxide semiconductors because of the large isotropic 5s orbital overlap in the In3+ ions. In this study, InOx films were deposited by plasma-enhanced atomic layer deposition (PEALD). We evaluated the effects of the...